Diamond thermal matrix demonstration for two-tier 3D integrated circuits

A diamond matrix scaffold is crucial for 3D dense chips because it provides exceptional thermal management due to its excellent thermal conductivity. Diamond can also replace copper thermal vias, enabling efficient heat transfer and improved cooling performance. Its low thermal boundary resistance w...

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Bibliographic Details
Main Authors: M. Malakoutian, J. Lyu, A. Kasperovich, R. Soman, K. Woo, N. Sinha, H. Sena, S. Chowdhury
Format: Article
Language:English
Published: AIP Publishing LLC 2025-04-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/5.0260085
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