Design and fabrication of the trapezoidal electrostatic comb-drive actuator
This paper reports the design, fabrication and characterization process of the trapezoidal Electrostatic Comb-drive Actuator (ECA) with the slope angle α=20. Together with the trapezoidal ones, the rectangular ECA with identical dimension was also designed and fabricated for comparison purpose. In...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Publishing House for Science and Technology
2012-11-01
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| Series: | Vietnam Journal of Mechanics |
| Subjects: | |
| Online Access: | https://vjs.ac.vn/index.php/vjmech/article/view/2338 |
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