Effect of Deposition Conditions on Microstructure and Composition of Nitride Monolayer and Carbide-Nitride Multilayer Coatings Based on W and Nb
This study investigates the structural and compositional evolution of monolayer WNbN and multilayer WNbN/WNbC coatings deposited by the cathodic arc evaporation. The effects of substrate bias voltage (–50 V to –200 V) and cathode arc current (130 – 150 A for W, 110 – 120 A for Nb) were systematicall...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
V.N. Karazin Kharkiv National University Publishing
2025-06-01
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| Series: | East European Journal of Physics |
| Subjects: | |
| Online Access: | https://periodicals.karazin.ua/eejp/article/view/26380 |
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