The Effect of Yttrium Addition on the Microstructures and Electrical Properties of CuMn Alloy Thin Films
In this study, we fabricated thin-film resistors using CuMn and yttrium targets by DC/RF magnetron cosputtering. CuMnY-resistive thin films were deposited onto glass and Al2O3 substrates. The electrical properties and microstructures of CuMn alloy films with different yttrium content were investigat...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2019-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2019/6578350 |
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