Investigation into electro mechanical behaviour of MEMS wing shaped dielectric capacitive pressure sensor conforming to set boundary conditions and sizing tolerances
Abstract Micro Electro Mechanical Systems (MEMS) based Capacitive Pressure Sensors (CPS) have shown their versatility and reliability in numerous applications. In this work, an innovative approach to optimize sensor performance through the integration of a novel wing-like mechanism is proposed. Unli...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-07-01
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| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-08654-3 |
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