Features of Ion-Electronic Emission from Surface of Semiconductors

Features of Ion-Electronic Emission from Surface of Semiconductors

The results of the research value of the current of the secondary electrons in the ion-beam etching of various semiconductors. Shows the setup and electrical circuit of the experiment. An experimental study to determine the dependence of the current of the secondary electrons from the band gap Eg an...

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Bibliographic Details
Main Authors: A. Kurochka, A. Sergienko, S. Kurochka, V. Kolybelkin, S.G. Emelyanov, E.V. Yakushko, L.M. Chervjakov
Format: Article
Language:English
Published: Sumy State University 2013-12-01
Series:Журнал нано- та електронної фізики
Subjects:
Ion-electronic emission
Ion-beam etching
Secondary electron current
Autoelectronic emission
Electron affinity
Space charge regio
Online Access:http://jnep.sumdu.edu.ua/download/numbers/2013/4/articles/jnep_2013_V5_04036.pdf
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http://jnep.sumdu.edu.ua/download/numbers/2013/4/articles/jnep_2013_V5_04036.pdf

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