Thin Metal Superlens Imaging in Nanolithography
Superlens imaging system in nanolithography can be regarded as a cascade of two F-P cavities, i.e., a superlens cavity and a dielectric cavity between superlens and introduced mask of high loss, and the transfer function of system is obtained by considering multiple reflections inside the two caviti...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2019-01-01
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| Series: | International Journal of Optics |
| Online Access: | http://dx.doi.org/10.1155/2019/6513836 |
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