Tuning the optical, electrical, and structural properties of Cu-DLC thin films via simultaneous DC-RF unbalanced magnetron sputtering

Tuning the optical, electrical, and structural properties of Cu-DLC thin films via simultaneous DC-RF unbalanced magnetron sputtering

This study evaluates the deposition of diamond-like carbon (DLC) films with copper impurities on a glass substrate using simultaneous direct current (DC) and radio frequency (RF) magnetron sputtering. The structural, optical, electrical, and mechanical properties, as well as the surface topography o...

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Bibliographic Details
Main Authors: Alireza Mikhchin, Seyed Iman Hosseini, Saeid Khodadadi Najaf Abadi, Babak Mohammadhosseini, Somayeh Mehrabian
Format: Article
Language:English
Published: Elsevier 2024-11-01
Series:Heliyon
Subjects:
Cu-DLC
Simultaneous DC-RF magnetron sputtering
Raman spectroscopy
Spectroscopic ellipsometry
Nanoindentation
Online Access:http://www.sciencedirect.com/science/article/pii/S2405844024162020
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