Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage
The wafer stage in dual-stage lithographic system is an air-bearing servo motion platform requiring high positioning accuracy and high transient performance. However, the residual vibration, resulting from almost zero damping, high velocity, parallel decoupling structure, and direct drive, brings ab...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2018-01-01
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| Series: | Complexity |
| Online Access: | http://dx.doi.org/10.1155/2018/4948368 |
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