Electrochemical deposition of cobalt phosphorus for hard magnetic micro devices and the impact on magnetic anisotropy
When fabricating magnetic components for micro-electro-mechanical systems, the intrinsic material properties as well as the magnetic anisotropy of the deposited material and the fabricated devices must be adjusted to the application. This work focuses on electrochemically deposited cobalt phosphorus...
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| Main Authors: | Felix Wetzler, Jan-Erik Nebel, Wei Zhang, Sven Urschel, Peter Starke, Monika Saumer |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-11-01
|
| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785424021495 |
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