Electrochemical deposition of cobalt phosphorus for hard magnetic micro devices and the impact on magnetic anisotropy

When fabricating magnetic components for micro-electro-mechanical systems, the intrinsic material properties as well as the magnetic anisotropy of the deposited material and the fabricated devices must be adjusted to the application. This work focuses on electrochemically deposited cobalt phosphorus...

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Bibliographic Details
Main Authors: Felix Wetzler, Jan-Erik Nebel, Wei Zhang, Sven Urschel, Peter Starke, Monika Saumer
Format: Article
Language:English
Published: Elsevier 2024-11-01
Series:Journal of Materials Research and Technology
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785424021495
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