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1
Study of interstage channel of hybrid turbomolecular pump
Published 2021-03-01Subjects: “…turbomolecular pump…”
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2
Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
Published 2018-05-01Subjects: Get full text
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3
The influence of interstage channel on efficiency of molecular drag stage in hybrid turbomolecular pump
Published 2021-10-01Subjects: “…turbomolecular pump…”
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