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    A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry

    A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry by Liyuan Ma, Xipeng Xu, Changcai Cui, Mai Gao, Tukun Li, Shan Lou, Paul J. Scott, Xiangqian Jiang, Wenhan Zeng

    Published 2025-01-01
    Subjects: “…spectroscopic ellipsometry…”
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