Search alternatives:
"resolution layering method" » "resolution layering methods" (Expand Search)
Showing 1 - 1 results of 1 for search '"resolution layering method"', query time: 0.10s Refine Results
  1. 1
    A Hierarchical Inverse Lithography Method Considering the Optimization and Manufacturability Limit by Gradient Descent

    A Hierarchical Inverse Lithography Method Considering the Optimization and Manufacturability Limit by Gradient Descent by Haifeng Sun, Qingyan Zhang, Jie Zhou, Jianwen Gong, Chuan Jin, Ji Zhou, Junbo Liu

    Published 2025-07-01
    Subjects:
    Get full text
    Article
    Save to List
    Saved in:

Search Tools: