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  1. 1
    Thermal Load Influence during the Formation of Al-Al Contacts on the Electrical Parameters of the Integrated Circuits with Aluminum-Polysilicon Contacts

    Thermal Load Influence during the Formation of Al-Al Contacts on the Electrical Parameters of the Integrated Circuits with Aluminum-Polysilicon Contacts by V. A. Pilipenko, V. A. Solodukha, N. S. Kovalchuk, J. A. Solovjov, D. V. Shestovski, D. V. Zhyhulin

    Published 2022-12-01
    Subjects: “…rapid thermal processing method…”
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  2. 2
    Research of Electrophysical Properties of Thin Gate Dielectrics Obtained by Rapid Thermal Processing Method

    Research of Electrophysical Properties of Thin Gate Dielectrics Obtained by Rapid Thermal Processing Method by N. S. Kovalchuk, A. A. Omelchenko, V. A. Pilipenko, V. A. Solodukha, S. V. Demidovich, V. V. Kolos, V. A. Filipenia, D. V. Shestovski

    Published 2022-06-01
    Subjects: “…rapid thermal processing method…”
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