Temperature-modulated crystallographic orientation and electrical properties of BiFeO3 thick films sputtered on LaNiO3/Pt/Ti/SiO2/Si for piezo-MEMS applications by Hongyu Luo, Miaomiao Niu, Hanfei Zhu, Li Li, Hongbo Cheng, Chao Liu, Jianting Li, Yuyao Zhao, Chenxi Zhang, Xiaojie Cao, Isaku Kanno, Qingguo Chi, Jun Ouyang

Subjects: “…piezoelectric micro-electro–mechanical system (piezo-mems)…”
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