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  1. 1
    Subwavelength phase engineering deep inside silicon

    Subwavelength phase engineering deep inside silicon by Mehmet Bütün, Alperen Saltik, Onur Tokel

    Published 2025-01-01
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  2. 2
    Pattern distortion in nanoimprint lithography using UV-curable polymer stamps

    Pattern distortion in nanoimprint lithography using UV-curable polymer stamps by Fangfang Li, Marina Fetisova, Mervi Koskinen, Jukka Viheriälä, Tapio Niemi, Petri Karvinen, Markku Kuittinen

    Published 2024-12-01
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  3. 3
    Advanced optical nanolithography by enhanced transmission through bull’s eye nanostructured meta-mask

    Advanced optical nanolithography by enhanced transmission through bull’s eye nanostructured meta-mask by Kim Taeyeon, Ahn Heesang, Kim Soojung, Song Hyerin, Choi Jong-ryul, Kim Kyujung

    Published 2023-04-01
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