The Effect of Metal Shielding Layer on Electrostatic Attraction Issue in Glass–Silicon Anodic Bonding by Wenqi Yang, Yong Ruan, Zhiqiang Song

Subjects: “…microelectromechanical systems (MEMS)…”
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Use of Attitude and Heading Reference System (AHRS) to Analyze the Impact of Safety Nets on the Accelerations Occurring in the Human Body During a Collision by Mariusz Gołkowski, Jerzy Kwaśniewski, Maciej Roskosz, Paweł Mazurek, Szymon Molski, Józef Grzybowski

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Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications by Abdurrashid Hassan Shuaibu, Almur A. S. Rabih, Yves Blaquière, Frederic Nabki

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Calculation strength of torsion bar suspension of micromirrors (MEOMS) by D. I. Chernyavsky, D. D. Chernyavsky

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Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS) by D. I. Chernyavsky, D. D. Chernyavsky

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Optical System Design and Characterization of MEMS Mirror-Based SPAD LiDAR System for Smart Factory Applications by Jeong-Yeon Hwang, Paul Raschdorf, Andre Henschke, Manuel Ligges, Sara Weyer, Shanshan Gu-Stoppel

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A 6.7 μW Low-Noise, Compact PLL with an Input MEMS-Based Reference Oscillator Featuring a High-Resolution Dead/Blind Zone-Free PFD by Ahmed Kira, Mohannad Y. Elsayed, Karim Allidina, Vamsy P. Chodavarapu, Mourad N. El-Gamal

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Design and Analysis of a Thermal Flowmeter for Microfluidic Applications: A Study on Sensitivity at Low Flow Rates by Aditya Hadalahally Raveesh, Sravani Vemulapalli, Alankrit Gupta, Santhosh Krishnan Venkata, Bhagya Rajesh Navada

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