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1
Comparative analysis of microelectromechanical inertial measurement units of various manufacturers for human motor activity monitoring
Published 2020-06-01Subjects: Get full text
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2
The Effect of Metal Shielding Layer on Electrostatic Attraction Issue in Glass–Silicon Anodic Bonding
Published 2024-12-01Subjects: “…microelectromechanical systems (MEMS)…”
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3
Comparison of MEMS-based photoacoustic microscopy in biomedical imaging
Published 2025-12-01Subjects: Get full text
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4
Calculation strength of torsion bar suspension of micromirrors (MEOMS)
Published 2021-06-01Subjects: Get full text
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5
Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)
Published 2021-03-01Subjects: Get full text
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