Microelectromechanical systems for improved gyroscope design by P. S. Kuznetsov

“…The present study of the development and creation of modern gyroscopes based on microelectromechanical systems (MEMS gyroscopes) analyzes the risks associated with the technological aspects of their production and identifies promising areas for further development both of MEMS gyroscopes themselves and the technologies used to manufacture them.Methods. …”
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Ceramics for Microelectromechanical Systems Applications: A Review by Ehsan Fallah Nia, Ammar Kouki

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High-Frequency Grating-Based Microelectromechanical Systems Actuator by Inês Pires, Inês S. Garcia, João Vieira, Zeev Zalevsky, Carlos Calaza, Filipe S. Alves, Rosana A. Dias

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Microelectromechanical Systems of the Impulse Betavoltaics Element for Electric Power of Biosensors by Yu.S. Nagornov

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Wafer-Level Packaging of Microelectromechanical Systems Based on Frame Structure by E. S. Barbin, I. V. Kulinich, T. G. Nesterenko, A. N. Koleda, E. V. Shesterikov, P. F. Baranov, D. P. Il’yaschenko

“…Modern microelectromechanical systems (MEMS) are devices that incorporate microelectronic components and micromechanical structures on a single chip. …”
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A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems by Jiawei Xuan, Ting Zhu, Gao Peng, Fayou Sun, Dawei Dong

Subjects: “…microelectromechanical systems…”
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Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing by Carolina Viola, Davide Pavesi, Lichen Weng, Giorgio Gobat, Federico Maspero, Valentina Zega

“…Microelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced costs. …”
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Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review by Lowell Welburn, Amir Milad Moshref Javadi, Luong Nguyen, Salil Desai

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Microelectromechanical system‐based biosensor for label‐free detection of human cytomegalovirus by Khalid E. Alzahrani, Abdulaziz K. Assaifan, Mahmoud Al‐Gawati, Abdullah M. Alswieleh, Hamad Albrithen, Abdullah Alodhayb

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TECHNIQUE OF PROCESSING OF VIBRATION MONITORING DATA, RECEIVED BY THE USE OF MICROELECTROMECHANICAL SYSTEMS by B. A. Chichkov

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Energy Harvesting Microelectromechanical System for Condition Monitoring Based on Piezoelectric Transducer Ring by Kaixuan Wang, Hao Long, Di Song, Hasan Shariar

“…Therefore, a piezoelectric transducer ring-based energy harvesting microelectromechanical system (PTR-EH-MEMS) is proposed for the condition monitoring of shaft bearings. …”
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Mode Optimization of Microelectromechanical-System Traveling-Wave Ultrasonic Motor Based on Kirigami by Rong Li, Longqi Ran, Cong Wang, Jiangbo He, Wu Zhou

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Resonant Drive Techniques for Electrostatic Microelectromechanical Systems (MEMS): A Comparative Study by Rana Abdelrahman, Alaaeldin Elhady, Yasser S. Shama, Mohamed Abdelrahman, Alexis Jollivet, Dogu Ozyigit, Mustafa Yavuz, Eihab M. Abdel-Rahman

“…Electrostatic actuation is widely employed in microelectromechanical systems (MEMS) due to its distinct advantages. …”
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Advances in Bio-Microelectromechanical System-Based Sensors for Next-Generation Healthcare Applications by Sahariya Priya, Sakar Mohan, Radhika Kuppusamy, Indran Suyambulingam, Bindhu Baby, Redrouthu Ramesh, Sung Soo Han

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VIBRATION SENSORS AND MICROELECTROMECHANICAL SYSTEM FOR MOBILE DEVICES SUCH AS ANALOGS, FOR EVALUATION OF VIBRATION OF ROTARY MACHINES by B. A. Chichkov

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Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication by Diogo E. Aguiam, Inês S. Garcia, Edoardo Sotgiu, Filipe S. Alves

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Numerical investigation of a fractal oscillator arising from the microbeams-based microelectromechanical system by Bin Chen, Junfeng Lu, Lei Chen

Subjects: “…Microelectromechanical system…”
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Noise Analysis and Suppression Methods for the Front-End Readout Circuit of a Microelectromechanical Systems Gyroscope by Chunhua He, Yingyu Xu, Xiaoman Wang, Heng Wu, Lianglun Cheng, Guizhen Yan, Qinwen Huang

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Ultrasonic Beamforming-Based Visual Localisation of Minor and Multiple Gas Leaks Using a Microelectromechanical System (MEMS) Microphone Array by Tao Wang, Jiawen Ji, Jianglong Lan, Bo Wang

“…A digital microelectromechanical system microphone array is used to capture spatial ultrasonic information. …”
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Electromechanical characterizations of PEDOT:PSS and its nanocomposite thin films on a cost-effective polymer substrate for microelectromechanical systems (MEMS) applications by Shehroze Tahir Khan, Murtuza Mehdi, Tariq Jamil

“…The films were rod-coated on a chemically treated, cost-effective single-component polymer that was previously characterized as an alternative available substrate material for stretchable and flexible microelectromechanical systems (MEMS) based devices. The results show that the films exhibit stable resistive behavior in response to various applied mechanical loads such as stretching, twisting, combined stretching, and twisting and forced vibrations. …”
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