Showing 1 - 3 results of 3 for search '"low thermal budget"', query time: 1.21s Refine Results
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    Ge N‐Channel Ferroelectric FET Memory With Al2O3/AlN Interfacial Layer by Microwave Annealing by Sheng‐Yen Zheng, Wei‐Ning Kao, Yu‐Hsing Chen, Yung‐Hsien Wu

    Published 2025-06-01
    “…The proposed IL and low thermal budget of MWA alleviate element diffusion and reduce oxygen vacancies, marking the first demonstration of Ge n‐FeFET memory devices controlled by dipoles. …”
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    Article
  3. 3

    Demonstration of Vertically Stacked ZnO/Te Complementary Field‐Effect Transistor by Kiyung Kim, Minjae Kim, Yongsu Lee, Hae‐Won Lee, Jae Hyeon Jun, Jun‐Hyeok Choi, Seongbeen Yoon, Hyeon‐Jun Hwang, Byoung Hun Lee

    Published 2025-08-01
    “…The proposed ZnO/Te CFET can be a promising device technology, particularly for 3D and heterojunction integration requiring a low thermal budget.…”
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    Article