-
1
Impact of post-deposition annealing on SiO2/SiC interfaces formed by plasma nitridation of the SiC surface and SiO2 deposition
Published 2024-01-01Subjects: Get full text
Article -
2
Nitridation Process Optimization of 4H-SiC Gate Oxidation
Published 2016-01-01Subjects: Get full text
Article -
3
Development of High Temperature Oxidation Technology for SiC and Analysis on the Characteristics of its Interface
Published 2015-01-01Subjects: Get full text
Article -
4
Performance and reliability improvements in SiC(0001) MOS devices via two-step annealing in H2/Ar gas mixtures
Published 2025-01-01Subjects: Get full text
Article -
5
p-CuGaO2/β-Ga2O3 interfaces: A high-throughput approach for interface prediction and generation for power device applications
Published 2025-06-01Subjects: Get full text
Article