The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror by Minqiang Li, Lin Qin, Xiasheng Wang, Jiaojiao Wen, Tong Wu, Xiaoming Huang, Hongbo Yin, Yi Tian, Zhuqing Wang

Subjects: Get full text

Vibration of electrically actuated MEMS Timoshenko microbeams based on a hierarchical beam element by Cong Ich Le, Dinh Kien Nguyen

Subjects: Get full text

Size-dependent behavior of a MEMS microbeam under electrostatic actuation by Cong Ich Le, Quang Dung Tran, Van Dung Lam, Dinh Kien Nguyen

Subjects: Get full text

Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays by Jiahao Chen, Xiaohui Yang, Mustaqim Siddi Que Iskhandar, Md. Kamrul Hasan, Shilby Baby, Muhammad Hasnain Qasim, Dennis Löber, Shujie Liu, Roland Donatiello, Steffen Liebermann, Guilin Xu, Hartmut Hillmer

Subjects: “…electrostatic actuation…”
Get full text

Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror by Longqin Wu, Yu-Sheng Lin

Subjects: Get full text

Low-Voltage Tri-Electrode Electrostatic Actuator Using Solid Gap-Spacing Materials by Mehdi Allameh, Byoungyoul Park, Cyrus Shafai

Subjects: Get full text

A Flexible PCB-Based MEMS Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator by Tao Chen, Cyrus Shafai

Subjects: Get full text

Optimized design and performance testing of hydraulic electrostatic actuator by Yuze Ye, Qingsong He, Changli Yang, Xiaodong Xu, Lin Xie, Diyi Liu, Bo Zeng, Zhijian Leng

Subjects: “…Hydraulic electrostatic actuator…”
Get full text

An electrostatic micro-electromechanical systems micromirror with low-torsional stress supported by three-asymptote beam by Xiao-Yong Fang, Ang Li, Er-Qi Tu, Bo Peng, Zhi-Ran Yi, Wen-Ming Zhang

Subjects: “…Vertically asymmetric electrostatic actuator…”
Get full text