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  1. 1
    Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry

    Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry by Wenyou Qiao, Zhishan Gao, Qun Yuan, Lu Chen, Zhenyan Guo, Xiao Huo, Qian Wang

    Published 2025-06-01
    Subjects: “…coherence scanning interferometry…”
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  2. 2
    Rigorous full 3D modeling of coherence scanning interferometry and confocal microscopy

    Rigorous full 3D modeling of coherence scanning interferometry and confocal microscopy by Tobias Pahl, Felix Rosenthal, Marco Künne, Eireen Käkel, Sebastian Hagemeier, Michael Diehl, Hartmut Hillmer, Peter Lehmann

    Published 2025-01-01
    Subjects: “…coherence scanning interferometry…”
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