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    Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

    Digital Etching of Molybdenum Interconnects Using Plasma Oxidation by Ivan Erofeev, Antony Winata Hartanto, Muhaimin Mareum Khan, Kerong Deng, Krishna Kumar, Zainul Aabdin, Weng Weei Tjiu, Mingsheng Zhang, Antoine Pacco, Harold Philipsen, Angshuman Ray Chowdhuri, Han Vinh Huynh, Frank Holsteyns, Utkur Mirsaidov

    Published 2025-01-01
    Subjects: “…atomic layer etching (ALE)…”
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