The Effect of Yttrium Addition on the Microstructures and Electrical Properties of CuMn Alloy Thin Films by Ho-Yun Lee, Chi-Wei He, Ying-Chieh Lee

“…The electrical properties and microstructures of CuMn alloy films with different yttrium content were investigated. The CuMnY films were annealed at temperature ranging from 250°C to 350°C in N2 atmosphere. …”
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