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    Research on the Improvement of Wear Resistance of Si<sub>3</sub>N<sub>4</sub> Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures by WANG He, CHEN Sibo, YAN Guangyu, WU Yuhou, CHU Jianxiang, DAI Guangyuan

    Published 2025-07-01
    Subjects: “…magnetron sputtering method;si<sub>3</sub>n<sub>4</sub> substrate;tin film;film-substrate adhesion;tribological property…”
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