SYSTEM OF STABILIZATION OF REACTIVE MAGNETRON SPUTTERING PROCESS by A. P. Burmakou, V. N. Kuleshov, A. V. Stoliarov

Subjects: “…reactive magnetron sputtering…”
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Electrophysical properties of vanadium oxide films deposited by reactive magnetron sputtering by T. D. Nguen, A. I. Zanko, D. A. Golosov, S. M. Zavadski, S. N. Melnikov, V. V. Kolos

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Formation of titanium oxide thin films by reactive magnetron sputtering by N. Villa, D. A. Golosov, T. D. Nguyen

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Control of Electrical and Optical Parameters of Humidity Sensors Active Elements Based on Tin Oxides Films with Variable Composition by D. V. Adamchuck, V. K. Ksenevich

Subjects: “…reactive magnetron sputtering…”
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Bixbyite‐Type Zirconium Tantalum Oxynitride Thin Films as Composition‐Tunable High Refractive Index Semiconductors by Laura I. Wagner, Alessia Canever, Elise Sirotti, Chang‐Ming Jiang, Frans Munnik, Verena Streibel, Ian D. Sharp

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Formation and investigation of characteristics of thermoresistive structures based on vanadium oxide films by T. D. Nguyen, A. I. Zanko, D. A. Golosov, S. M. Zavadski, S. N. Melnikov, V. V. Kolos, N. К. Тоlochko

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Formation of AlN Layers at Magnetron Sputtering of Aluminum in Ar + N2 Gas Mixture by A.S. Kornyushchenko

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Influence of Zirconium Doping on the Dielectric Properties of Hafnium Oxide Films by D. A. Golosov, J. Zhang, S. M. Zavadski, S. N. Melnikov, H. T. Doan, P. A. Alexandrovitch

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Influence of annealing on structure, phase and electrophysical properties of vanadium oxide films by T. D. Nguen, A. I. Zanko, D. A. Golosov, S. M. Zavadski, S. N. Melnikov, V. V. Kolos, T. Q. To

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Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings by Andrey V. Kaziev, Alexander V. Tumarkin, Dobrynya V. Kolodko, Maksim M. Kharkov, Raghavendra Konaguru, Dmitry G. Ageychenkov, Nikolay N. Samotaev, Konstantin Yu. Oblov

Subjects: “…reactive magnetron sputtering…”
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Model of Reactive Magnetron Sputtering of a Two-Component Composite Target by H. T. Doan, D. A. Golosov, Jin Zhang, S. M. Zavadski, S. N. Melnikov, T. D. Nguyen

Subjects: “…reactive magnetron sputtering…”
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GAS FLOW CONTROL SYSTEM IN REACTIVE MAGNETRON SPUTTERING TECHNOLOGY by I. M. Klimovich, V. N. Kuleshov, V. A. Zaikou, A. P. Burmakou, F. F. Komarov, O. R. Ludchik

Subjects: “…reactive magnetron sputtering…”
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