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    Dynamic 3D profiling of microscale surface using a MEMS mirror laser differential confocal microscope

    Dynamic 3D profiling of microscale surface using a MEMS mirror laser differential confocal microscope by Qingjiu Chen, Donghai Yang, Feifei Wang, Wen Jung Li

    Published 2025-07-01
    Subjects: “…Dynamic 3D surface profiling…”
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