Simulation Study on Switching Process and Reverse Recovery Performance of Low Miller Capacitance Super Junction MOSFET

For super junction field effect transistor (SJ-MOSFET), two device structures with different p-pillar morphology of multiple epitaxial ion implantation and deep groove etching were established. The static characteristics of SJ-MOS with different processes and gate structures were compared and studie...

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Main Authors: Maosen TANG, Dong LIU, Jun SHEN, Xinlai GE, Rongbin ZHOU, Junhan YE
Format: Article
Language:zho
Published: Editorial Department of Electric Drive for Locomotives 2021-09-01
Series:机车电传动
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Online Access:http://edl.csrzic.com/thesisDetails#10.13890/j.issn.1000-128x.2021.05.006
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author Maosen TANG
Dong LIU
Jun SHEN
Xinlai GE
Rongbin ZHOU
Junhan YE
author_facet Maosen TANG
Dong LIU
Jun SHEN
Xinlai GE
Rongbin ZHOU
Junhan YE
author_sort Maosen TANG
collection DOAJ
description For super junction field effect transistor (SJ-MOSFET), two device structures with different p-pillar morphology of multiple epitaxial ion implantation and deep groove etching were established. The static characteristics of SJ-MOS with different processes and gate structures were compared and studied, and compared with the measured data to verify the correctness of the model.From the perspective of uneven expansion of space charge region, the micro mechanism of "capacitance turning" phenomenon in <italic>C</italic>-<italic>V</italic> characteristic test of devices with different process routes was analyzed. Then, the variation of gate voltage, drain current and drain source voltage with time in the switching process of SJ-MOS under inductive load was studied. Finally, a parasitic diode reverse recovery test platform was built to explore the effects of different processes on parameters such as reverse recovery charge and peak current. The research content of this paper could guide the device design to a certain extent and improve the matching degree of power semiconductor devices in locomotive application scenarios.
format Article
id doaj-art-ff44b29494d9417580dbc9f1b9859f3f
institution DOAJ
issn 1000-128X
language zho
publishDate 2021-09-01
publisher Editorial Department of Electric Drive for Locomotives
record_format Article
series 机车电传动
spelling doaj-art-ff44b29494d9417580dbc9f1b9859f3f2025-08-20T03:09:15ZzhoEditorial Department of Electric Drive for Locomotives机车电传动1000-128X2021-09-01384620898586Simulation Study on Switching Process and Reverse Recovery Performance of Low Miller Capacitance Super Junction MOSFETMaosen TANGDong LIUJun SHENXinlai GERongbin ZHOUJunhan YEFor super junction field effect transistor (SJ-MOSFET), two device structures with different p-pillar morphology of multiple epitaxial ion implantation and deep groove etching were established. The static characteristics of SJ-MOS with different processes and gate structures were compared and studied, and compared with the measured data to verify the correctness of the model.From the perspective of uneven expansion of space charge region, the micro mechanism of "capacitance turning" phenomenon in <italic>C</italic>-<italic>V</italic> characteristic test of devices with different process routes was analyzed. Then, the variation of gate voltage, drain current and drain source voltage with time in the switching process of SJ-MOS under inductive load was studied. Finally, a parasitic diode reverse recovery test platform was built to explore the effects of different processes on parameters such as reverse recovery charge and peak current. The research content of this paper could guide the device design to a certain extent and improve the matching degree of power semiconductor devices in locomotive application scenarios.http://edl.csrzic.com/thesisDetails#10.13890/j.issn.1000-128x.2021.05.006super junction MOSFET<italic>C</italic>-<italic>V</italic> characteristicbody diodedouble pulse testreverse recovery test
spellingShingle Maosen TANG
Dong LIU
Jun SHEN
Xinlai GE
Rongbin ZHOU
Junhan YE
Simulation Study on Switching Process and Reverse Recovery Performance of Low Miller Capacitance Super Junction MOSFET
机车电传动
super junction MOSFET
<italic>C</italic>-<italic>V</italic> characteristic
body diode
double pulse test
reverse recovery test
title Simulation Study on Switching Process and Reverse Recovery Performance of Low Miller Capacitance Super Junction MOSFET
title_full Simulation Study on Switching Process and Reverse Recovery Performance of Low Miller Capacitance Super Junction MOSFET
title_fullStr Simulation Study on Switching Process and Reverse Recovery Performance of Low Miller Capacitance Super Junction MOSFET
title_full_unstemmed Simulation Study on Switching Process and Reverse Recovery Performance of Low Miller Capacitance Super Junction MOSFET
title_short Simulation Study on Switching Process and Reverse Recovery Performance of Low Miller Capacitance Super Junction MOSFET
title_sort simulation study on switching process and reverse recovery performance of low miller capacitance super junction mosfet
topic super junction MOSFET
<italic>C</italic>-<italic>V</italic> characteristic
body diode
double pulse test
reverse recovery test
url http://edl.csrzic.com/thesisDetails#10.13890/j.issn.1000-128x.2021.05.006
work_keys_str_mv AT maosentang simulationstudyonswitchingprocessandreverserecoveryperformanceoflowmillercapacitancesuperjunctionmosfet
AT dongliu simulationstudyonswitchingprocessandreverserecoveryperformanceoflowmillercapacitancesuperjunctionmosfet
AT junshen simulationstudyonswitchingprocessandreverserecoveryperformanceoflowmillercapacitancesuperjunctionmosfet
AT xinlaige simulationstudyonswitchingprocessandreverserecoveryperformanceoflowmillercapacitancesuperjunctionmosfet
AT rongbinzhou simulationstudyonswitchingprocessandreverserecoveryperformanceoflowmillercapacitancesuperjunctionmosfet
AT junhanye simulationstudyonswitchingprocessandreverserecoveryperformanceoflowmillercapacitancesuperjunctionmosfet