Layer Number Controllable Molybdenum Disulfide Film Growth and Its Applications in Vertical and Planar Photodetectors
Abstract Wafer‐scale and layered MoS2 films are grown by sulfurizing amorphous MoS2 films deposited on sapphire substrates by using a radio‐frequency sputtering system. To verify the layer numbers of the multi‐layer MoS2 films, atomic layer etchings are adopted. Wafer‐scale MoS2 film growth with goo...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2025-03-01
|
| Series: | Advanced Materials Interfaces |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/admi.202400641 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|