Deuterated SiN/SiON Waveguides on Si Platform and Their Application to C-Band WDM Filters
We describe low-loss SiN/SiON waveguides for wavelength-division-multiplexing filters on a Si platform. The key technology is a low-temperature deposition of refractive-index-controllable SiN/SiON films by using a hydrogen-free gas source (SiD<sub>4</sub>), which av...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
|
| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7995037/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | We describe low-loss SiN/SiON waveguides for wavelength-division-multiplexing filters on a Si platform. The key technology is a low-temperature deposition of refractive-index-controllable SiN/SiON films by using a hydrogen-free gas source (SiD<sub>4</sub>), which avoids the strong optical absorption due to N-H bond. Using this technology, we demonstrate a low-loss ring resonator with a SiN waveguide, whose loss is 0.47 dB/cm at 1550 nm. It shows excess loss of 2.7 dB, a 3-dB bandwidth of 0.13 nm, and an extinction ratio of 27 dB in the entire C band. In addition, we also demonstrate a polarization-insensitive arrayed-waveguide grating with a SiON waveguide, whose loss is 0.29 dB/cm at 1550 nm. It shows insertion loss of 5.3 dB, crosstalk of less than −27 dB, and polarization insensitivity in the entire C band. |
|---|---|
| ISSN: | 1943-0655 |