White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation
Based on generalized cross-correlation time delay estimation (GCTDE), a new white light scanning interferometry (WLSI) method is proposed, in which the profile information usually achieved with the zero optical path difference (ZOPD) position is replaced with the relative displacement of interferenc...
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| Format: | Article |
| Language: | English |
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IEEE
2017-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/8003458/ |
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| author | Yunfei Zhou Liyun Zhong Hongzhi Cai Jindong Tian Dong Li Xiaoxu Lu |
| author_facet | Yunfei Zhou Liyun Zhong Hongzhi Cai Jindong Tian Dong Li Xiaoxu Lu |
| author_sort | Yunfei Zhou |
| collection | DOAJ |
| description | Based on generalized cross-correlation time delay estimation (GCTDE), a new white light scanning interferometry (WLSI) method is proposed, in which the profile information usually achieved with the zero optical path difference (ZOPD) position is replaced with the relative displacement of interference signal between different pixels. Because all spectral information of interference signal (envelope and phase) and filter is utilized, the proposed GCTDE-based WLSI method reveals the advantages of higher accuracy and better noise suppression capability. Especially, in the case where the shape of interference signal envelope is irregular, the proposed method can achieve profile measurement with high accuracy while the conventional ZOPD position locating method cannot work. Moreover, by introducing laser interferometry system to calibrate the vertical displacement of a piezoelectric ceramic transducer scanning system, the measuring accuracy of the proposed GCTDE-based WLSI is further improved. Both the simulation and the experimental results demonstrate the significant accuracy advantage of the proposed GCTDE-based WLSI. |
| format | Article |
| id | doaj-art-fd3b2520e46a41c7bbf597b39ae5ce80 |
| institution | OA Journals |
| issn | 1943-0655 |
| language | English |
| publishDate | 2017-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-fd3b2520e46a41c7bbf597b39ae5ce802025-08-20T02:38:11ZengIEEEIEEE Photonics Journal1943-06552017-01-019511110.1109/JPHOT.2017.27372318003458White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay EstimationYunfei Zhou0Liyun Zhong1Hongzhi Cai2Jindong Tian3Dong Li4Xiaoxu Lu5Guangdong Provincial Key Laboratory of Nanophotonic Functional Materials and Devices, South China Normal University, Guangzhou, ChinaGuangdong Provincial Key Laboratory of Nanophotonic Functional Materials and Devices, South China Normal University, Guangzhou, ChinaGuangdong Provincial Key Laboratory of Nanophotonic Functional Materials and Devices, South China Normal University, Guangzhou, ChinaCollege of Optoelectronic Engineering, Shenzhen University, Shenzhen, ChinaCollege of Optoelectronic Engineering, Shenzhen University, Shenzhen, ChinaGuangdong Provincial Key Laboratory of Nanophotonic Functional Materials and Devices, South China Normal University, Guangzhou, ChinaBased on generalized cross-correlation time delay estimation (GCTDE), a new white light scanning interferometry (WLSI) method is proposed, in which the profile information usually achieved with the zero optical path difference (ZOPD) position is replaced with the relative displacement of interference signal between different pixels. Because all spectral information of interference signal (envelope and phase) and filter is utilized, the proposed GCTDE-based WLSI method reveals the advantages of higher accuracy and better noise suppression capability. Especially, in the case where the shape of interference signal envelope is irregular, the proposed method can achieve profile measurement with high accuracy while the conventional ZOPD position locating method cannot work. Moreover, by introducing laser interferometry system to calibrate the vertical displacement of a piezoelectric ceramic transducer scanning system, the measuring accuracy of the proposed GCTDE-based WLSI is further improved. Both the simulation and the experimental results demonstrate the significant accuracy advantage of the proposed GCTDE-based WLSI.https://ieeexplore.ieee.org/document/8003458/Generalized cross-correlation time delay estimationwhite light scanning interferometryzero optical path differenceinterference signal envelope. |
| spellingShingle | Yunfei Zhou Liyun Zhong Hongzhi Cai Jindong Tian Dong Li Xiaoxu Lu White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation IEEE Photonics Journal Generalized cross-correlation time delay estimation white light scanning interferometry zero optical path difference interference signal envelope. |
| title | White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation |
| title_full | White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation |
| title_fullStr | White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation |
| title_full_unstemmed | White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation |
| title_short | White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation |
| title_sort | white light scanning interferometry based on generalized cross correlation time delay estimation |
| topic | Generalized cross-correlation time delay estimation white light scanning interferometry zero optical path difference interference signal envelope. |
| url | https://ieeexplore.ieee.org/document/8003458/ |
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