Rigorous full 3D modeling of coherence scanning interferometry and confocal microscopy
We present a simulation model of coherence scanning interferometry and confocal microscopy as the two most common techniques for high-precision optical surface topography measurement. The surface scattering process is computed rigorously using finite element method calculations. In contrast to other...
Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
|
| Series: | JPhys Photonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2515-7647/addbb2 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!