An Improved SPICE Model for MEMS Based Capacitive Accelerometers
An improved electrical equivalent circuit for a capacitive MEMS accelerometer, incorporating temperature, pressure and squeezed film effects is reported. The circuit model corresponds to a single degree of freedom (SDOF) vibrating system, including dominant micro physical mechanisms. Static, transie...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2013-05-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2013/2/articles/jnep_2013_V5_02011.pdf |
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