Machining Path Optimization of Inductively Coupled Plasma Based on Surface Heat Transfer Model

Machining Path Optimization of Inductively Coupled Plasma Based on Surface Heat Transfer Model

Inductively coupled plasma (ICP), a non-contact optical processing method, has been widely used in the preparation of fused quartz. However, the thermal effect during processing inevitably affects the stability of the removal rate, reduces the processing accuracy, and restricts the further developme...

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Bibliographic Details
Main Authors: Peiqi Jiao, Bin Fan, Qiang Xin, Xiang Wu, Hong Wang
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Micromachines
Subjects:
optical processing
heat transfer models
path optimization
Online Access:https://www.mdpi.com/2072-666X/16/1/71
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