Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation

Superconducting nanowire single-photon detectors (SNSPDs) are indispensable in fields such as quantum science and technology, astronomy, and biomedical imaging, where high detection efficiency, low dark count rates, and high timing accuracy are required. Recently, helium (He) ion irradiation was sho...

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Main Authors: Stefan Strohauer, Fabian Wietschorke, Markus Döblinger, Christian Schmid, Stefanie Grotowski, Lucio Zugliani, Björn Jonas, Kai Müller, Jonathan J. Finley
Format: Article
Language:English
Published: AIP Publishing LLC 2025-06-01
Series:APL Quantum
Online Access:http://dx.doi.org/10.1063/5.0259935
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author Stefan Strohauer
Fabian Wietschorke
Markus Döblinger
Christian Schmid
Stefanie Grotowski
Lucio Zugliani
Björn Jonas
Kai Müller
Jonathan J. Finley
author_facet Stefan Strohauer
Fabian Wietschorke
Markus Döblinger
Christian Schmid
Stefanie Grotowski
Lucio Zugliani
Björn Jonas
Kai Müller
Jonathan J. Finley
author_sort Stefan Strohauer
collection DOAJ
description Superconducting nanowire single-photon detectors (SNSPDs) are indispensable in fields such as quantum science and technology, astronomy, and biomedical imaging, where high detection efficiency, low dark count rates, and high timing accuracy are required. Recently, helium (He) ion irradiation was shown to be a promising method to enhance SNSPD performance. Here, we study how changes in the underlying superconducting NbTiN film and the SiO2/Si substrate affect device performance. While irradiated and unirradiated NbTiN films show similar crystallinity, we observe He bubble formation below the SiO2/Si interface and an amorphization of the Si substrate. Both reduce the thermal conductance between the superconducting thin film and the substrate from 210 to 70 W m−2 K−4 after irradiation with 2000 ions nm−2. This effect, combined with the lateral straggle of He ions in the substrate, allows the modification of the superconductor-to-substrate thermal conductance of an SNSPD by selectively irradiating only the regions around the nanowire. With this approach, we achieved a broader bias current range (9.8 μA vs 3.7 µA) in which the detector operates at its maximum detection efficiency, which is beneficial for reducing dark counts while maintaining high sensitivity. Moreover, the photon-assisted critical current remained similar to that of the unirradiated reference device (59.0 µA vs 60.1 µA), while full irradiation reduced it to 22.4 µA. Our results suggest that the irradiation-induced reduction of the thermal conductance significantly enhances SNSPD sensitivity, offering a novel approach to locally engineer substrate properties for improved detector performance.
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spelling doaj-art-f43c449fca8e4d9b8d9923eeb49ea5642025-08-20T02:37:38ZengAIP Publishing LLCAPL Quantum2835-01032025-06-0122026131026131-1610.1063/5.0259935Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiationStefan Strohauer0Fabian Wietschorke1Markus Döblinger2Christian Schmid3Stefanie Grotowski4Lucio Zugliani5Björn Jonas6Kai Müller7Jonathan J. Finley8Walter Schottky Institute, Technical University of Munich, 85748 Garching, GermanyWalter Schottky Institute, Technical University of Munich, 85748 Garching, GermanyFaculty for Chemistry and Pharmacy, Ludwig Maximilian University of Munich, 81377 Munich, GermanyWalter Schottky Institute, Technical University of Munich, 85748 Garching, GermanyWalter Schottky Institute, Technical University of Munich, 85748 Garching, GermanyWalter Schottky Institute, Technical University of Munich, 85748 Garching, GermanyWalter Schottky Institute, Technical University of Munich, 85748 Garching, GermanyWalter Schottky Institute, Technical University of Munich, 85748 Garching, GermanyWalter Schottky Institute, Technical University of Munich, 85748 Garching, GermanySuperconducting nanowire single-photon detectors (SNSPDs) are indispensable in fields such as quantum science and technology, astronomy, and biomedical imaging, where high detection efficiency, low dark count rates, and high timing accuracy are required. Recently, helium (He) ion irradiation was shown to be a promising method to enhance SNSPD performance. Here, we study how changes in the underlying superconducting NbTiN film and the SiO2/Si substrate affect device performance. While irradiated and unirradiated NbTiN films show similar crystallinity, we observe He bubble formation below the SiO2/Si interface and an amorphization of the Si substrate. Both reduce the thermal conductance between the superconducting thin film and the substrate from 210 to 70 W m−2 K−4 after irradiation with 2000 ions nm−2. This effect, combined with the lateral straggle of He ions in the substrate, allows the modification of the superconductor-to-substrate thermal conductance of an SNSPD by selectively irradiating only the regions around the nanowire. With this approach, we achieved a broader bias current range (9.8 μA vs 3.7 µA) in which the detector operates at its maximum detection efficiency, which is beneficial for reducing dark counts while maintaining high sensitivity. Moreover, the photon-assisted critical current remained similar to that of the unirradiated reference device (59.0 µA vs 60.1 µA), while full irradiation reduced it to 22.4 µA. Our results suggest that the irradiation-induced reduction of the thermal conductance significantly enhances SNSPD sensitivity, offering a novel approach to locally engineer substrate properties for improved detector performance.http://dx.doi.org/10.1063/5.0259935
spellingShingle Stefan Strohauer
Fabian Wietschorke
Markus Döblinger
Christian Schmid
Stefanie Grotowski
Lucio Zugliani
Björn Jonas
Kai Müller
Jonathan J. Finley
Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation
APL Quantum
title Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation
title_full Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation
title_fullStr Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation
title_full_unstemmed Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation
title_short Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation
title_sort origin of performance enhancement of superconducting nanowire single photon detectors by he ion irradiation
url http://dx.doi.org/10.1063/5.0259935
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