Investigation of the Influence of Adhesion Layers on the Gas Sensing Performance of CuO/Cu<sub>2</sub>O Thin Films

This parameter study examines the impact of two distinct adhesion layers, chromium (Cr) and titanium (Ti), on the performance of CuO/Cu<sub>2</sub>O-based chemoresistive gas sensors by varying the layer thickness. The sensing material utilised on a Si-SiO<sub>2</sub> sensor c...

Full description

Saved in:
Bibliographic Details
Main Authors: Christian Maier, Larissa Egger, Anton Köck, Klaus Reichmann
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Chemosensors
Subjects:
Online Access:https://www.mdpi.com/2227-9040/13/3/80
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This parameter study examines the impact of two distinct adhesion layers, chromium (Cr) and titanium (Ti), on the performance of CuO/Cu<sub>2</sub>O-based chemoresistive gas sensors by varying the layer thickness. The sensing material utilised on a Si-SiO<sub>2</sub> sensor chip with Pt electrodes is an ultrathin CuO/Cu<sub>2</sub>O film fabricated through thermal deposition of Cu and subsequent oxidation. The sensors were evaluated by measuring the change in electrical resistance against a range of target gases, including carbon monoxide (CO), carbon dioxide (CO<sub>2</sub>) and a mixture of hydrocarbons (HC<sub>Mix</sub>), in order to assess any potential cross-sensitivity issues. As the reactions occur at the surface, the surface was characterised by scanning electron microscopy (SEM) and the composition by grazing incidence X-Ray diffraction (GIXRD) measurement to gain further insight into the influence of the adhesion layer on the sensing performance.
ISSN:2227-9040