Investigation of the Influence of Adhesion Layers on the Gas Sensing Performance of CuO/Cu<sub>2</sub>O Thin Films
This parameter study examines the impact of two distinct adhesion layers, chromium (Cr) and titanium (Ti), on the performance of CuO/Cu<sub>2</sub>O-based chemoresistive gas sensors by varying the layer thickness. The sensing material utilised on a Si-SiO<sub>2</sub> sensor c...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
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| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/13/3/80 |
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| Summary: | This parameter study examines the impact of two distinct adhesion layers, chromium (Cr) and titanium (Ti), on the performance of CuO/Cu<sub>2</sub>O-based chemoresistive gas sensors by varying the layer thickness. The sensing material utilised on a Si-SiO<sub>2</sub> sensor chip with Pt electrodes is an ultrathin CuO/Cu<sub>2</sub>O film fabricated through thermal deposition of Cu and subsequent oxidation. The sensors were evaluated by measuring the change in electrical resistance against a range of target gases, including carbon monoxide (CO), carbon dioxide (CO<sub>2</sub>) and a mixture of hydrocarbons (HC<sub>Mix</sub>), in order to assess any potential cross-sensitivity issues. As the reactions occur at the surface, the surface was characterised by scanning electron microscopy (SEM) and the composition by grazing incidence X-Ray diffraction (GIXRD) measurement to gain further insight into the influence of the adhesion layer on the sensing performance. |
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| ISSN: | 2227-9040 |