Liu, B., Zhong, S., Liu, J., Xia, Y., & Li, C. Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells. Wiley.
Chicago Style (17th ed.) CitationLiu, Bangwu, Sihua Zhong, Jinhu Liu, Yang Xia, and Chaobo Li. Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells. Wiley.
MLA (9th ed.) CitationLiu, Bangwu, et al. Silicon Nitride Film by Inline PECVD for Black Silicon Solar Cells. Wiley.
Warning: These citations may not always be 100% accurate.