Surface Electric Potential Measurement with a Static Probe
Surface electric potential measurements are widely used in non-destructive inspection and testing of precision surfaces, for example, in the production of semiconductor devices and integrated circuits. Features of the construction and application of devices for measuring the surface electric potenti...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2023-08-01
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| Series: | Приборы и методы измерений |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/825 |
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| author | R. I. Vorobey O. K. Gusev A. I. Zharin V. A. Mikitsevich K. U. Pantsialeyeu A. V. Samarina A. I. Svistun A. K. Tyavlovsky K. L. Tyavlovsky |
| author_facet | R. I. Vorobey O. K. Gusev A. I. Zharin V. A. Mikitsevich K. U. Pantsialeyeu A. V. Samarina A. I. Svistun A. K. Tyavlovsky K. L. Tyavlovsky |
| author_sort | R. I. Vorobey |
| collection | DOAJ |
| description | Surface electric potential measurements are widely used in non-destructive inspection and testing of precision surfaces, for example, in the production of semiconductor devices and integrated circuits. Features of the construction and application of devices for measuring the surface electric potential using an immovable reference electrode are considered. Despite the need to increase the area of the probe compared to devices with a vibrating probe, measurement techniques with an immovable probe have a number of advantages and could expand the scope of surface electric potential measurements in the inspection of samples with precise surfaces. Models of the formation of a measuring signal in the presence of a spatial inhomogeneity of surface electric potential are presented and discussed. |
| format | Article |
| id | doaj-art-ee52b2927f0c4559863eabf3caa2b1c2 |
| institution | Kabale University |
| issn | 2220-9506 2414-0473 |
| language | English |
| publishDate | 2023-08-01 |
| publisher | Belarusian National Technical University |
| record_format | Article |
| series | Приборы и методы измерений |
| spelling | doaj-art-ee52b2927f0c4559863eabf3caa2b1c22025-02-03T11:37:39ZengBelarusian National Technical UniversityПриборы и методы измерений2220-95062414-04732023-08-0114213514410.21122/2220-9506-2023-14-2-135-144616Surface Electric Potential Measurement with a Static ProbeR. I. Vorobey0O. K. Gusev1A. I. Zharin2V. A. Mikitsevich3K. U. Pantsialeyeu4A. V. Samarina5A. I. Svistun6A. K. Tyavlovsky7K. L. Tyavlovsky8Belarusian National Technical UniversityBelarusian National Technical UniversityBelarusian National Technical UniversityBelarusian National Technical UniversityBelarusian National Technical UniversityBelarusian National Technical UniversityBelarusian National Technical UniversityBelarusian National Technical UniversityBelarusian National Technical UniversitySurface electric potential measurements are widely used in non-destructive inspection and testing of precision surfaces, for example, in the production of semiconductor devices and integrated circuits. Features of the construction and application of devices for measuring the surface electric potential using an immovable reference electrode are considered. Despite the need to increase the area of the probe compared to devices with a vibrating probe, measurement techniques with an immovable probe have a number of advantages and could expand the scope of surface electric potential measurements in the inspection of samples with precise surfaces. Models of the formation of a measuring signal in the presence of a spatial inhomogeneity of surface electric potential are presented and discussed.https://pimi.bntu.by/jour/article/view/825surface electric potentialsurface photovoltagekelvin probe techniquetwo-capacitor techniquestatic probe |
| spellingShingle | R. I. Vorobey O. K. Gusev A. I. Zharin V. A. Mikitsevich K. U. Pantsialeyeu A. V. Samarina A. I. Svistun A. K. Tyavlovsky K. L. Tyavlovsky Surface Electric Potential Measurement with a Static Probe Приборы и методы измерений surface electric potential surface photovoltage kelvin probe technique two-capacitor technique static probe |
| title | Surface Electric Potential Measurement with a Static Probe |
| title_full | Surface Electric Potential Measurement with a Static Probe |
| title_fullStr | Surface Electric Potential Measurement with a Static Probe |
| title_full_unstemmed | Surface Electric Potential Measurement with a Static Probe |
| title_short | Surface Electric Potential Measurement with a Static Probe |
| title_sort | surface electric potential measurement with a static probe |
| topic | surface electric potential surface photovoltage kelvin probe technique two-capacitor technique static probe |
| url | https://pimi.bntu.by/jour/article/view/825 |
| work_keys_str_mv | AT rivorobey surfaceelectricpotentialmeasurementwithastaticprobe AT okgusev surfaceelectricpotentialmeasurementwithastaticprobe AT aizharin surfaceelectricpotentialmeasurementwithastaticprobe AT vamikitsevich surfaceelectricpotentialmeasurementwithastaticprobe AT kupantsialeyeu surfaceelectricpotentialmeasurementwithastaticprobe AT avsamarina surfaceelectricpotentialmeasurementwithastaticprobe AT aisvistun surfaceelectricpotentialmeasurementwithastaticprobe AT aktyavlovsky surfaceelectricpotentialmeasurementwithastaticprobe AT kltyavlovsky surfaceelectricpotentialmeasurementwithastaticprobe |