APA (7th ed.) Citation

Oliveira, E., Strassner, J., Doering, C., & Fouckhardt, H. Reactive Ion Etching (RIE) Induced Surface Roughness Precisely Monitored In-Situ and in Real Time by Reflectance Anisotropy Spectroscopy (RAS) in Combination with Principle Component Analysis (PCA). Wiley.

Chicago Style (17th ed.) Citation

Oliveira, Emerson, Johannes Strassner, Christoph Doering, and Henning Fouckhardt. Reactive Ion Etching (RIE) Induced Surface Roughness Precisely Monitored In-Situ and in Real Time by Reflectance Anisotropy Spectroscopy (RAS) in Combination with Principle Component Analysis (PCA). Wiley.

MLA (9th ed.) Citation

Oliveira, Emerson, et al. Reactive Ion Etching (RIE) Induced Surface Roughness Precisely Monitored In-Situ and in Real Time by Reflectance Anisotropy Spectroscopy (RAS) in Combination with Principle Component Analysis (PCA). Wiley.