Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures
To meet various application requirements, it is important to enable an improvement of a-C structure and properties, such as hardness, adhesion, and wear resistance. In this study, we used the Raman spectroscopy to investigate the a-C thin films structure dependence on the different deposition parame...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2013-01-01
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| Series: | Journal of Spectroscopy |
| Online Access: | http://dx.doi.org/10.1155/2013/467079 |
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| author | M. Marton M. Vojs E. Zdravecká M. Himmerlich T. Haensel S. Krischok M. Kotlár P. Michniak M. Veselý R. Redhammer |
| author_facet | M. Marton M. Vojs E. Zdravecká M. Himmerlich T. Haensel S. Krischok M. Kotlár P. Michniak M. Veselý R. Redhammer |
| author_sort | M. Marton |
| collection | DOAJ |
| description | To meet various application requirements, it is important to enable an improvement of a-C structure and properties, such as hardness, adhesion, and wear resistance. In this study, we used the Raman spectroscopy to investigate the a-C thin films structure dependence on the different deposition parameters. The effect of nitrogen, argon, and hydrogen gas flow rate was analyzed to determine the influence on the film properties. The change in the gas type, combination, and flow had a significant influence on the D and G bands of the a-C Raman spectra. The addition of N2 into the chamber promoted the sp2 creation, while with adding hydrogen the layer contained more sp3 bonds. The depositions of a-C thin films were carried out in pulsed arc discharge vacuum installation. Micro-Raman measurements of the deposited materials were performed using an ISA Dilor-Jobin Yvon-Spex Labram confocal system with 632.8 nm radiation from a He-Ne laser using a back-scattering geometry. |
| format | Article |
| id | doaj-art-edc7011b5aa94492af26577d02cc784c |
| institution | Kabale University |
| issn | 2314-4920 2314-4939 |
| language | English |
| publishDate | 2013-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Journal of Spectroscopy |
| spelling | doaj-art-edc7011b5aa94492af26577d02cc784c2025-02-03T01:11:08ZengWileyJournal of Spectroscopy2314-49202314-49392013-01-01201310.1155/2013/467079467079Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas MixturesM. Marton0M. Vojs1E. Zdravecká2M. Himmerlich3T. Haensel4S. Krischok5M. Kotlár6P. Michniak7M. Veselý8R. Redhammer9FEI, STU in Bratislava, Ilkovičova 3, 841 04 Bratislava, SlovakiaFEI, STU in Bratislava, Ilkovičova 3, 841 04 Bratislava, SlovakiaDepartment of Technologies and Materials, FME TU of Košice, Mäsiarska 74, 040 01 Košice, SlovakiaCenter for Micro- and Nanotechnologies, TU Ilmenau, Gustav-Kirchhoff-Straße 7, 98693 Ilmenau, GermanyCenter for Micro- and Nanotechnologies, TU Ilmenau, Gustav-Kirchhoff-Straße 7, 98693 Ilmenau, GermanyCenter for Micro- and Nanotechnologies, TU Ilmenau, Gustav-Kirchhoff-Straße 7, 98693 Ilmenau, GermanyFEI, STU in Bratislava, Ilkovičova 3, 841 04 Bratislava, SlovakiaFEI, STU in Bratislava, Ilkovičova 3, 841 04 Bratislava, SlovakiaFEI, STU in Bratislava, Ilkovičova 3, 841 04 Bratislava, SlovakiaFEI, STU in Bratislava, Ilkovičova 3, 841 04 Bratislava, SlovakiaTo meet various application requirements, it is important to enable an improvement of a-C structure and properties, such as hardness, adhesion, and wear resistance. In this study, we used the Raman spectroscopy to investigate the a-C thin films structure dependence on the different deposition parameters. The effect of nitrogen, argon, and hydrogen gas flow rate was analyzed to determine the influence on the film properties. The change in the gas type, combination, and flow had a significant influence on the D and G bands of the a-C Raman spectra. The addition of N2 into the chamber promoted the sp2 creation, while with adding hydrogen the layer contained more sp3 bonds. The depositions of a-C thin films were carried out in pulsed arc discharge vacuum installation. Micro-Raman measurements of the deposited materials were performed using an ISA Dilor-Jobin Yvon-Spex Labram confocal system with 632.8 nm radiation from a He-Ne laser using a back-scattering geometry.http://dx.doi.org/10.1155/2013/467079 |
| spellingShingle | M. Marton M. Vojs E. Zdravecká M. Himmerlich T. Haensel S. Krischok M. Kotlár P. Michniak M. Veselý R. Redhammer Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures Journal of Spectroscopy |
| title | Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures |
| title_full | Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures |
| title_fullStr | Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures |
| title_full_unstemmed | Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures |
| title_short | Raman Spectroscopy of Amorphous Carbon Prepared by Pulsed Arc Discharge in Various Gas Mixtures |
| title_sort | raman spectroscopy of amorphous carbon prepared by pulsed arc discharge in various gas mixtures |
| url | http://dx.doi.org/10.1155/2013/467079 |
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