FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION
Design and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method. r-spacing:-.05pt&...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2015-03-01
|
| Series: | Приборы и методы измерений |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/38 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1832557343755206656 |
|---|---|
| author | O. G. Reutskaya Ya. A. Belahurau I. A. Taratyn V. V. Khatko |
| author_facet | O. G. Reutskaya Ya. A. Belahurau I. A. Taratyn V. V. Khatko |
| author_sort | O. G. Reutskaya |
| collection | DOAJ |
| description | Design and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method. r-spacing:-.05pt'>боты микросистемы. |
| format | Article |
| id | doaj-art-ed8690bab053408cbe1b4baf6ad0fa09 |
| institution | Kabale University |
| issn | 2220-9506 2414-0473 |
| language | English |
| publishDate | 2015-03-01 |
| publisher | Belarusian National Technical University |
| record_format | Article |
| series | Приборы и методы измерений |
| spelling | doaj-art-ed8690bab053408cbe1b4baf6ad0fa092025-02-03T05:16:56ZengBelarusian National Technical UniversityПриборы и методы измерений2220-95062414-04732015-03-0102475132FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATIONO. G. Reutskaya0Ya. A. Belahurau1I. A. Taratyn2V. V. Khatko3Минский НИИ радиоматериалов, г. МинскБелорусский национальный технический университетМинский НИИ радиоматериалов, г. МинскБелорусский национальный технический университетDesign and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method. r-spacing:-.05pt'>боты микросистемы.https://pimi.bntu.by/jour/article/view/38napoporous anodic aluminafour sensor gas microsystemfinite element method |
| spellingShingle | O. G. Reutskaya Ya. A. Belahurau I. A. Taratyn V. V. Khatko FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION Приборы и методы измерений napoporous anodic alumina four sensor gas microsystem finite element method |
| title | FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION |
| title_full | FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION |
| title_fullStr | FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION |
| title_full_unstemmed | FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION |
| title_short | FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION |
| title_sort | four sensor gas microsystem based on porous anodic alumina substrate design fabrication technique simulation |
| topic | napoporous anodic alumina four sensor gas microsystem finite element method |
| url | https://pimi.bntu.by/jour/article/view/38 |
| work_keys_str_mv | AT ogreutskaya foursensorgasmicrosystembasedonporousanodicaluminasubstratedesignfabricationtechniquesimulation AT yaabelahurau foursensorgasmicrosystembasedonporousanodicaluminasubstratedesignfabricationtechniquesimulation AT iataratyn foursensorgasmicrosystembasedonporousanodicaluminasubstratedesignfabricationtechniquesimulation AT vvkhatko foursensorgasmicrosystembasedonporousanodicaluminasubstratedesignfabricationtechniquesimulation |