Recent Advances in Piezoelectric Compliant Devices for Ultrahigh-Precision Engineering
With advancements in small-scale research fields, precision manipulation has become crucial for interacting with small objects. As research progresses, the demand for higher precision in manipulation has led to the emergence of ultrahigh-precision engineering (UHPE), which exhibits significant poten...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/12/1456 |
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