Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning

Experimental study on the damage characteristics of sol-gel antireflection coatings on large-aperture optical components by in-situ plasma cleaning

Low-pressure plasma cleaning technology is currently regarded as a highly promising method for the effective in-situ removal of surface contaminants from large-aperture optical components (LAOC) (⩾430 mm) in laser fusion facilities. After a long cleaning, irreversible damage can occur to the sol-gel...

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Bibliographic Details
Main Authors: Rongqi Shen, Yuhai Li, Zixu Wang, Laixi Sun, Xiaodong Yuan, Xiang Dong, Xia Xiang, Bo Li, Xujie Liu, Xueshi Xu, Tingting Wang, Qingshun Bai
Format: Article
Language:English
Published: IOP Publishing 2025-01-01
Series:Nuclear Fusion
Subjects:
low-pressure plasma
large-aperture optical component
in-situ cleaning
sol-gel antireflective coatings
nano-porosity defects
Online Access:https://doi.org/10.1088/1741-4326/adaed2
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