High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM
We describe the design and performance of an orthogonal time-of-flight (TOF) secondary ion mass spectrometer that can be retrofitted to existing focused ion beam (FIB) instruments. In particular, a simple interface has been developed for FIB/SEM instruments from the manufacturer Tescan. Orthogonal e...
Saved in:
| Main Authors: | , , , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2012-01-01
|
| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2012/180437 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1832555571728875520 |
|---|---|
| author | James A. Whitby Fredrik Östlund Peter Horvath Mihai Gabureac Jessica L. Riesterer Ivo Utke Markus Hohl Libor Sedláček Jaroslav Jiruše Vinzenz Friedli Mikhael Bechelany Johann Michler |
| author_facet | James A. Whitby Fredrik Östlund Peter Horvath Mihai Gabureac Jessica L. Riesterer Ivo Utke Markus Hohl Libor Sedláček Jaroslav Jiruše Vinzenz Friedli Mikhael Bechelany Johann Michler |
| author_sort | James A. Whitby |
| collection | DOAJ |
| description | We describe the design and performance of an orthogonal time-of-flight (TOF) secondary ion mass spectrometer that can be retrofitted to existing focused ion beam (FIB) instruments. In particular, a simple interface has been developed for FIB/SEM instruments from the manufacturer Tescan. Orthogonal extraction to the mass analyser obviates the need to pulse the primary ion beam and does not require the use of monoisotopic gallium to preserve mass resolution. The high-duty cycle and reasonable collection efficiency of the new instrument combined with the high spatial resolution of a gallium liquid metal ion source allow chemical observation of features smaller than 50 nm. We have also demonstrated the integration of a scanning probe microscope (SPM) operated as an atomic force microscope (AFM) within the FIB/SEM-SIMS chamber. This provides roughness information, and will also allow true three dimensional chemical images to be reconstructed from SIMS measurements. |
| format | Article |
| id | doaj-art-eaeebff03f0a452da05750683fcaff68 |
| institution | Kabale University |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2012-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-eaeebff03f0a452da05750683fcaff682025-02-03T05:47:51ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422012-01-01201210.1155/2012/180437180437High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFMJames A. Whitby0Fredrik Östlund1Peter Horvath2Mihai Gabureac3Jessica L. Riesterer4Ivo Utke5Markus Hohl6Libor Sedláček7Jaroslav Jiruše8Vinzenz Friedli9Mikhael Bechelany10Johann Michler11EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandEMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandEMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandEMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandEMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandEMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandTOFWERK AG, Uttigenstrasse 22, 3600 Thun, SwitzerlandTescan a. s., Libušina třída 21, 623 00 Brno, Czech RepublicTescan a. s., Libušina třída 21, 623 00 Brno, Czech RepublicEMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandEMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandEMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandWe describe the design and performance of an orthogonal time-of-flight (TOF) secondary ion mass spectrometer that can be retrofitted to existing focused ion beam (FIB) instruments. In particular, a simple interface has been developed for FIB/SEM instruments from the manufacturer Tescan. Orthogonal extraction to the mass analyser obviates the need to pulse the primary ion beam and does not require the use of monoisotopic gallium to preserve mass resolution. The high-duty cycle and reasonable collection efficiency of the new instrument combined with the high spatial resolution of a gallium liquid metal ion source allow chemical observation of features smaller than 50 nm. We have also demonstrated the integration of a scanning probe microscope (SPM) operated as an atomic force microscope (AFM) within the FIB/SEM-SIMS chamber. This provides roughness information, and will also allow true three dimensional chemical images to be reconstructed from SIMS measurements.http://dx.doi.org/10.1155/2012/180437 |
| spellingShingle | James A. Whitby Fredrik Östlund Peter Horvath Mihai Gabureac Jessica L. Riesterer Ivo Utke Markus Hohl Libor Sedláček Jaroslav Jiruše Vinzenz Friedli Mikhael Bechelany Johann Michler High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM Advances in Materials Science and Engineering |
| title | High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM |
| title_full | High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM |
| title_fullStr | High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM |
| title_full_unstemmed | High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM |
| title_short | High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM |
| title_sort | high spatial resolution time of flight secondary ion mass spectrometry for the masses a novel orthogonal tof fib sims instrument with in situ afm |
| url | http://dx.doi.org/10.1155/2012/180437 |
| work_keys_str_mv | AT jamesawhitby highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT fredrikostlund highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT peterhorvath highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT mihaigabureac highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT jessicalriesterer highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT ivoutke highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT markushohl highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT liborsedlacek highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT jaroslavjiruse highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT vinzenzfriedli highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT mikhaelbechelany highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm AT johannmichler highspatialresolutiontimeofflightsecondaryionmassspectrometryforthemassesanovelorthogonaltoffibsimsinstrumentwithinsituafm |