Boron-doped diamond MOSFETs operating at temperatures up to 400°C

The boron-doped diamond (B-diamond) metal-oxide–semiconductor field–effect transistors (MOSFETs) are fabricated and characterized at operating temperatures up to 400°C. The SiO2 serves as the gate oxide insulator, while the Ti/Pt bilayer is employed as the gate contact metal. As the operating temper...

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Bibliographic Details
Main Authors: Jiangwei Liu, Tokuyuki Teraji, Bo Da, Yasuo Koide
Format: Article
Language:English
Published: Taylor & Francis Group 2025-12-01
Series:Functional Diamond
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Online Access:http://dx.doi.org/10.1080/26941112.2025.2450513
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