Athermal Tantalum Pentoxide Mach-Zehnder Interferometers Based on Structural Compensation Method
We demonstrate Mach-Zehnder interferometer-based (MZI) athermal photonic devices using the structural compensation method. Unlike previous structural compensation studies that were applied on the thermal sensitive materials such as silicon, this work is implemented in tantalum pentoxide (Ta<sub&g...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10854680/ |
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