Facile Construction of a Laser Scanning Optical Beam Induced Current Microscope

Facile Construction of a Laser Scanning Optical Beam Induced Current Microscope

We report on the design and construction of a laser scanning optical beam-induced current (OBIC) microscope by assembling cost-effective commercial optical and electronic hardware components and developing data acquisition and control software in LabVIEW. A preliminary OBIC image of a Si photodetect...

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Bibliographic Details
Main Authors: Ankita Buragohain, Nayan M. Kakoty, Guan-Yu Zhuo, Gazi A. Ahmed, Fu-Jen Kao, Nirmal Mazumder, Ankur Gogoi
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Photonics Journal
Subjects:
Current measurement
data acquisition
failure analysis
optical imaging
microscopy
semiconductor device testing
Online Access:https://ieeexplore.ieee.org/document/10380660/
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Summary:We report on the design and construction of a laser scanning optical beam-induced current (OBIC) microscope by assembling cost-effective commercial optical and electronic hardware components and developing data acquisition and control software in LabVIEW. A preliminary OBIC image of a Si photodetector acquired by the developed microscope is presented to demonstrate its operational capability. The versatility of the design will allow for the construction of other scanning microscope modalities on the same platform.
ISSN:1943-0655

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