Performance Optimization of High Voltage Thyristor Based on Vacuum Deposited Aluminum Diffusion Technology

In the design of silicon parameters of high voltage thyristor device, the flatness of PN junction formed by different kinds of diffusion process is one of the key factors in the manufacturing. In order to obtain better dynamic and static characteristics of high voltage fast thyristor, starting with...

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Main Authors: YIN Dengjie, HE Zhenqing, LI Yong, JIAO Shasha
Format: Article
Language:zho
Published: Editorial Office of Control and Information Technology 2017-01-01
Series:Kongzhi Yu Xinxi Jishu
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Online Access:http://ctet.csrzic.com/thesisDetails#10.13889/j.issn.2095-3631.2017.06.008
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author YIN Dengjie
HE Zhenqing
LI Yong
JIAO Shasha
author_facet YIN Dengjie
HE Zhenqing
LI Yong
JIAO Shasha
author_sort YIN Dengjie
collection DOAJ
description In the design of silicon parameters of high voltage thyristor device, the flatness of PN junction formed by different kinds of diffusion process is one of the key factors in the manufacturing. In order to obtain better dynamic and static characteristics of high voltage fast thyristor, starting with manufacturing process, the flatness difference of PN junction formed by vacuum deposited aluminum diffusion and close-tube aluminum diffusion process was discussed firstly, then through the theoretical calculation and Silvaco simulation, the relationship between the voltage of the device and the junction depth was obtained, and based on the consideration of the flatness of PN junction, the minimum thickness of silicon under two different conditions was designed. Experimental results showed that the performance optimization of the device was obvious based on the vacuum deposited aluminum diffusion technology and its optimum silicon parameters.
format Article
id doaj-art-ea324deab08449e9a6baa4ed8f70d83f
institution Kabale University
issn 2096-5427
language zho
publishDate 2017-01-01
publisher Editorial Office of Control and Information Technology
record_format Article
series Kongzhi Yu Xinxi Jishu
spelling doaj-art-ea324deab08449e9a6baa4ed8f70d83f2025-08-25T06:54:44ZzhoEditorial Office of Control and Information TechnologyKongzhi Yu Xinxi Jishu2096-54272017-01-0134384182328994Performance Optimization of High Voltage Thyristor Based on Vacuum Deposited Aluminum Diffusion TechnologyYIN DengjieHE ZhenqingLI YongJIAO ShashaIn the design of silicon parameters of high voltage thyristor device, the flatness of PN junction formed by different kinds of diffusion process is one of the key factors in the manufacturing. In order to obtain better dynamic and static characteristics of high voltage fast thyristor, starting with manufacturing process, the flatness difference of PN junction formed by vacuum deposited aluminum diffusion and close-tube aluminum diffusion process was discussed firstly, then through the theoretical calculation and Silvaco simulation, the relationship between the voltage of the device and the junction depth was obtained, and based on the consideration of the flatness of PN junction, the minimum thickness of silicon under two different conditions was designed. Experimental results showed that the performance optimization of the device was obvious based on the vacuum deposited aluminum diffusion technology and its optimum silicon parameters.http://ctet.csrzic.com/thesisDetails#10.13889/j.issn.2095-3631.2017.06.008vacuum deposited aluminum diffusionclose-tube aluminum diffusionPN junctionwafer thicknessfast switching thyristor
spellingShingle YIN Dengjie
HE Zhenqing
LI Yong
JIAO Shasha
Performance Optimization of High Voltage Thyristor Based on Vacuum Deposited Aluminum Diffusion Technology
Kongzhi Yu Xinxi Jishu
vacuum deposited aluminum diffusion
close-tube aluminum diffusion
PN junction
wafer thickness
fast switching thyristor
title Performance Optimization of High Voltage Thyristor Based on Vacuum Deposited Aluminum Diffusion Technology
title_full Performance Optimization of High Voltage Thyristor Based on Vacuum Deposited Aluminum Diffusion Technology
title_fullStr Performance Optimization of High Voltage Thyristor Based on Vacuum Deposited Aluminum Diffusion Technology
title_full_unstemmed Performance Optimization of High Voltage Thyristor Based on Vacuum Deposited Aluminum Diffusion Technology
title_short Performance Optimization of High Voltage Thyristor Based on Vacuum Deposited Aluminum Diffusion Technology
title_sort performance optimization of high voltage thyristor based on vacuum deposited aluminum diffusion technology
topic vacuum deposited aluminum diffusion
close-tube aluminum diffusion
PN junction
wafer thickness
fast switching thyristor
url http://ctet.csrzic.com/thesisDetails#10.13889/j.issn.2095-3631.2017.06.008
work_keys_str_mv AT yindengjie performanceoptimizationofhighvoltagethyristorbasedonvacuumdepositedaluminumdiffusiontechnology
AT hezhenqing performanceoptimizationofhighvoltagethyristorbasedonvacuumdepositedaluminumdiffusiontechnology
AT liyong performanceoptimizationofhighvoltagethyristorbasedonvacuumdepositedaluminumdiffusiontechnology
AT jiaoshasha performanceoptimizationofhighvoltagethyristorbasedonvacuumdepositedaluminumdiffusiontechnology